Banner

Synthesis of new classes of FEBID precursors

Several novel precursors have been synthesized and their performance in the FEBID process has been evaluated.

Novel bimetallic precursors

The novel precursor HFeCo3(CO)12 was synthesized and and yields FeCo3 metallic phases with predefined stochiometry and metal content up to 80% in the FEBID process:

Novel Ru precursor (η3-C3H5)Ru(CO)3Br

CO ligands readily detaches from this precursor and Br can be removed by applying larger electron exposures. However, despite the fact that loss of the allyl ligand is also an important process observed in the gas phase, carbon remains behind upon decomposition on a surface:

Silacyclohexane precusors

Novel silacyclohexane precursors are favourable for deposition of silicon carbides as they retain the initial stochiometry in the deposit:

Small volatile Au precursors

Evaluation in the FEBID process has revealed that [ClAu(III)Me2]2 and MeAu(I)(PMe3) are suitable precursors for Au deposition:

Novel precursor for deposition of high-purity Ag

In the FEBID process, Ag-(2,2-dimethylbutanoato-κO) yields Ag deposits with purities up to 75%: